University of Bath:
Hitachi SEM and pattern generator for electron-beam lithography
University of Bath:
Plasma etching and deposition systems
University of Bath:
Kal Suss MJB-3 mask aligner
University of Bath:
Xiangyi with her LED in our David Bullett Nanofabrication Facility
University of Bath:
Dektak surface profiler
University of Bath:
Alice Ekrek Equipment Nanofab
University of Bath:
Oxford Instruments Plasmalab System 100 Cobra
University of Bath:
Argon-ion miller
University of Bath:
Heidelberg uPG101 direct laser writer
University of Bath:
Heidelberg uPG101 direct laser writer - small samples
University of Bath:
Heidelberg uPG101 direct laser writer
University of Bath:
EVG 620 NIL system with SmartNIL
University of Bath:
EVG 620 NIL system with SmartNIL
University of Bath:
PhableR 100M Displacement Talbot Lithography system
University of Bath:
Wet chemical fumehoods
University of Bath:
Headway spinner set-up for small samples
University of Bath:
Headway spin coater
University of Bath:
Optical microscope providing resolution down to 1 micron
University of Bath:
Diamond scribe
University of Bath:
Diamond scribe
University of Bath:
webresDSC06896
University of Bath:
Dedicated HF fumehood
University of Bath:
Edwards FL-400 electron-beam evaporator
University of Bath:
Argon-ion beam miller and Edwards Auto 306 thermal evaporator
University of Bath:
HHV Auto500 sputter coater
University of Bath:
HHV Auto500 Sputter coater - chamber
University of Bath:
Plasma Therm 790 series PE-CVD
University of Bath:
Plasma Therm 790 series PE-CVD - chamber
University of Bath:
Dektak surface profiler